JPH0452990Y2 - - Google Patents
Info
- Publication number
- JPH0452990Y2 JPH0452990Y2 JP18906887U JP18906887U JPH0452990Y2 JP H0452990 Y2 JPH0452990 Y2 JP H0452990Y2 JP 18906887 U JP18906887 U JP 18906887U JP 18906887 U JP18906887 U JP 18906887U JP H0452990 Y2 JPH0452990 Y2 JP H0452990Y2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- workpiece
- arm
- transfer
- standby position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 21
- 238000004381 surface treatment Methods 0.000 claims description 10
- 238000003780 insertion Methods 0.000 description 12
- 230000037431 insertion Effects 0.000 description 12
- 239000002904 solvent Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18906887U JPH0452990Y2 (en]) | 1987-12-11 | 1987-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18906887U JPH0452990Y2 (en]) | 1987-12-11 | 1987-12-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0193725U JPH0193725U (en]) | 1989-06-20 |
| JPH0452990Y2 true JPH0452990Y2 (en]) | 1992-12-14 |
Family
ID=31480125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18906887U Expired JPH0452990Y2 (en]) | 1987-12-11 | 1987-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452990Y2 (en]) |
-
1987
- 1987-12-11 JP JP18906887U patent/JPH0452990Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0193725U (en]) | 1989-06-20 |
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